ASML Holding N.V.
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Publicatie datum
13 jul 2015 - 17:00
Statutaire naam
ASML Holding N.V.
Titel
Cymer to Reduce Neon Consumption on ArF and KrF Light Sources
Bericht
Neon reduction program enables chipmakers to reduce operating costs, while maintaining high performance across all conditions
San Diego, California, July 13, 2015 - Cymer, an ASML company, an industry leader in developing lithography light sources used by chipmakers to pattern advanced semiconductor chips, today announced a neon gas reduction program for the installed base of argon fluoride (ArF) and krypton fluoride (KrF) light sources. The program includes new light source software to reduce neon consumption across the installed base of light sources, rapid qualification of new gas suppliers, and a light source upgrade to enable reclaim of used neon, allowing gas suppliers to reuse existing neon and further reduce the need for additional supplies. The neon gas reduction program has been put in place by Cymer to reduce dependence on neon, a key gas for operation of the light source, and to insulate our customers from fluctuations of neon supply.
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Datum laatste update: 28 juli 2024