ASML Holding N.V.
Hieronder vindt u informatie uit het register openbaarmaking voorwetenschap. Deze informatie is door de organisatie verstrekt.
Publicatie datum
01 dec 2014 - 00:29
Statutaire naam
ASML Holding N.V.
Titel
Cymer Announces its New XLR 700ix DUV Light Source
Bericht
Improves on-wafer critical dimension (CD) uniformity, enabling higher productivity
San Diego, California, December 1, 2014 - Cymer, LLC, an ASML company, the world's leading supplier of light sources used by chipmakers to pattern advanced semiconductor chips, today announced its new argon fluoride (ArF) immersion light source, the XLR 700ix. Built on the industry leading XLR platform, the 700ix provides improvements in bandwidth, wavelength and energy stability, enabling higher scanner throughput and process stability for advanced 14nm chip manufacturing and beyond.
Datum laatste update: 02 september 2024